In the semiconductor manufacturing process, Chemical Mechanical Polishing (CMP) is a technique used in semiconductor fabrication for planarizing the top surface of an in-process semiconductor wafer. In CMP process, the semiconductor substrate is polished by metal-oxide slurry using elastomer pad. According to the substrate, the process is consists of ILD, STI, and metal CMP.

Generally, metal-oxide slurry for CMP is in need of stable dispersion, high removal rate, less defect such as scratch on the surface after polishing, high purity chemicals. KONASIL is superior to this application for highly pure silicon dioxide, uniform particle size and proper size distribution.

Silicon rubber exhibits unique properties, that is, excellent weather and thermal stability, extreme-lowtemperature flexibility, good release property, physiological inertness and high gas permeability.

KONASIL is used as a reinforcing filler in silicone rubber to increase mechanical strength and improve properties of the gum. The tensile strength of the silicone gum can be increased over a factor of 50 times by the addition with KONASIL with surface area 200§³/g (K-200) much higher than carbon black.

The strength properties of silicone rubber increase with the fumed silica dosage. It is important to note that the refractive index of KONASIL(1.47) closely matches that of silicone rubber polymer. So, it is possible to produce transparent silicone rubber.

KONASIL is used to increase viscosity, provide reinforcement, and improve bond strength when used in sealants, adhesives and caulks formulations. In one-part and two-part RTV silicone sealants,

KONASIL is used to provide rheology and reinforcement at a level of 5 to 10wt% in the formulations.

Many solvent-based adhesives consist of an elastomer and a solvent. KONASIL is used to improve not only the rheology but also the bond strength of the elastomers used in adhesives.

KONASIL is also used in hot-melt adhesives. These adhesives are in the spotlight because of their lack of solvent and the consequent avoidance of air pollution problem. Hot-melt adhesives are thermoplastics that when melted adhere to their substrates. On cooling they revert to a solid form and thus become an adhesive layer with considerable strength. KONASIL can be used at about 5wt% in polystyrene-polyolefin-polystyrene blocked copolymer rubber to impart improved strength properties.

KONASIL is used in various applications to provide viscosity control and thixotropic behavior to many systems including paint and coatings. The thickening, suspension, and thixotropic properties of silicas in liquid system largely depend on the tendency of silica aggregates to link together into chains through hydrogen bonding. KONASIL performs best in thickening and thixotropic properties in nonhydrogen-bonding systems. The thickening efficiency of KONASIL is substantially reduced in hydrogen bonding systems such as glycerin and water.

Unsaturated polyester resin is used to produce fiberglass reinforced plastics(FRP). It is customary to add KONASIL to the polyester resin to make the material thixotropic, which prevents the draining or sagging of resin when applied to vertical surface. The thixotropic character is provided by 0.5 to 1.5 parts KONASIL. The thixotropic behavior of KONASIL in resins can be further enhanced by using ethylene glycol or suitable hydroxyl-containing polar chemicals. The function of the additive is to act as a bridging agent between the silanol group and hydroxyl group of the additive, thereby producing an overall increase in the viscosity of the system.

Unsaturated polyester gel coats are used in many industries such as the marine industry, the transportation industry and the sanitary ware industry. Gel coats are applied at a thickness of about 20mm in the fabrication part. The function of the KONASIL is to provide a highenough viscosity of 20,000 cps or higher to prevent the gel coat from sagging or draining from the vertical mold surface prior to gelation.

Caking and lumping are experienced in hygroscopic powders, chemicals, resins, adhesives, and specialty powders. KONASIL is used at a level of less than 2wt% to improve the flow properties of PVC master-batches, resins, adhesives, and other specialty chemicals. The nano-sized fumed silica encloses the powders, reduces the frictional force and makes them freely flow. Hydrophobic KONASIL is effective in improving flow properties of hygroscopic powders.

KONASIL consists of very small particles and there are lots of spaces between the particles. KONASIL has relatively low thermal conductivity. All these properties are helpful to minimize heat-transfer through the silica or the air. KONASIL is also stable at high temperature and non-flammable.

KONASIL is an excellent heat-insulation material. KONASIL has the characteristics of high-purity, less impurities compared to precipitated silicas and makes a good electric insulator. KONASIL is suitable for reinforcing filler of the elastomers which need a high insulation properties.

Plate-out is the deposition of certain oily ingredients colors onto the rolls and hot metal surfaces of plastic processing equipment. The addition of KONASIL eliminates the plate-out problems of plasticized PVC by selectively adsorbing the plating ingredients.

The important application of KONASIL in plastics is to prevent blocking and slip effects. Blocking usually happens with thin films, whereas slip occurs between the surfaces of packing foils. The tendency of polyvinyl, polyethylene, polypropylene, and other plastic films and sheets to stick together can be significantly minimized by the addition of KONASIL to the resin formulation. KONASIL resists blocking by temporarily absorbing plasticizers that can cause tack. Silica also produces an imperceptible roughness and texturing of the surface that lessens the total area of contact.

Liquid or Paste-like substances can be converted to free-flowing powders, when mixed with KONASIL.

KONASIL is used in pigmented polyester varnishes and epoxy paints. Small amounts of fumed silica, from 0.5 to 5wt% are used in alkyd and acrylic paints to keep the pigments in suspension and provide the desired rheology to the formulations. In paper industry KONASIL is used to produce coated paper of exceptionally good contrast qualitiy.